Inventor
RHOADES CHARLES S
US9 patents
⚠️ This page may combine multiple inventors who share the name “RHOADES CHARLES S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS5494523AFeb 27, 1996
Controlling plasma particulates by contouring the plasma sheath using materials of differing RF impedances
APPLIED MATERIALS INC53 citations96
US5486235AJan 23, 1996
Plasma dry cleaning of semiconductor processing chambers
APPLIED MATERIALS INC74 citations96
US5221424AJun 22, 1993
Method for removal of photoresist over metal which also removes or inactivates corosion-forming materials remaining from previous metal etch
APPLIED MATERIALS INC65 citations95
US5545289AAug 13, 1996
Passivating, stripping and corrosion inhibition of semiconductor substrates
APPLIED MATERIALS INC184 citations94
US5423918AJun 13, 1995
Method for reducing particulate contamination during plasma processing of semiconductor devices
APPLIED MATERIALS INC37 citations92
US5384009AJan 24, 1995
Plasma etching using xenon
APPLIED MATERIALS INC57 citations91
US5387556AFeb 7, 1995
Etching aluminum and its alloys using HC1, C1-containing etchant and N.sub.2
APPLIED MATERIALS INC49 citations89