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Inventor

MACKIE NEIL M

US8 patents
⚠️ This page may combine multiple inventors who share the name “MACKIE NEIL M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MIASOLE

4 patents
US7785921B1Aug 31, 2010

Barrier for doped molybdenum targets

MIASOLE32 citations90
US7897020B2Mar 1, 2011

Method for alkali doping of thin film photovoltaic materials

MIASOLE14 citations83
US8017976B2Sep 13, 2011

Barrier for doped molybdenum targets

MIASOLE3 citations60
US7927912B2Apr 19, 2011

Method of forming a sputtering target

MIASOLE1 citations60

MACKIE NEIL M

2 patents
US8134069B2Mar 13, 2012

Method and apparatus for controllable sodium delivery for thin film photovoltaic materials

MACKIE NEIL M11 citations79
US8313976B2Nov 20, 2012

Method and apparatus for controllable sodium delivery for thin film photovoltaic materials

MACKIE NEIL M0 citations47

MATTSON TECH INC

1 patent
US6835278B2Dec 28, 2004

Systems and methods for remote plasma clean

MATTSON TECH INC62 citations94

JULIANO DANIEL R

1 patent
US8076174B2Dec 13, 2011

Method of forming a sputtering target

JULIANO DANIEL R1 citations58