Inventor
HASEGAWA FUMIHIKO
JP30 patents
⚠️ This page may combine multiple inventors who share the name “HASEGAWA FUMIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU HANDOTAI KK
25 patentsUS6234879B1May 22, 2001
Method and apparatus for wafer chamfer polishing
SHINETSU HANDOTAI KK76 citations96
US5879220AMar 9, 1999
Apparatus for mirror-polishing thin plate
SHINETSU HANDOTAI KK80 citations96
US5514025AMay 7, 1996
Apparatus and method for chamfering the peripheral edge of a wafer to specular finish
SHINETSU HANDOTAI KK60 citations96
US5174067ADec 29, 1992
Automatic wafer lapping apparatus
SHINETSU HANDOTAI KK56 citations96
US5126113AJun 30, 1992
Apparatus for producing czochralski-grown single crystals
SHINETSU HANDOTAI KK58 citations95
US5860853AJan 19, 1999
Apparatus for polishing wafers
SHINETSU HANDOTAI KK26 citations93
US5700179ADec 23, 1997
Method of manufacturing semiconductor wafers and process of and apparatus for grinding used for the same method of manufacture
SHINETSU HANDOTAI KK63 citations93
US5928066AJul 27, 1999
Apparatus for polishing peripheral portion of wafer
SHINETSU HANDOTAI KK19 citations92
US5882539AMar 16, 1999
Wafer processing method and equipment therefor
SHINETSU HANDOTAI KK37 citations92
US5733181AMar 31, 1998
Apparatus for polishing the notch of a wafer
SHINETSU HANDOTAI KK38 citations92
US5727990AMar 17, 1998
Method for mirror-polishing chamfered portion of wafer and mirror-polishing apparatus
SHINETSU HANDOTAI KK49 citations92
US5547415AAug 20, 1996
Method and apparatus for wafer chamfer polishing
SHINETSU HANDOTAI KK25 citations92
US5476413ADec 19, 1995
Apparatus for polishing the periphery portion of a wafer
SHINETSU HANDOTAI KK52 citations92
US5317836AJun 7, 1994
Apparatus for polishing chamfers of a wafer
SHINETSU HANDOTAI KK31 citations92
US5316620AMay 31, 1994
Method and an apparatus for polishing wafer chamfers
SHINETSU HANDOTAI KK29 citations92
US5282289AFeb 1, 1994
Scrubber apparatus for cleaning a thin disk work
SHINETSU HANDOTAI KK30 citations92
US5913719AJun 22, 1999
Workpiece holding mechanism
SHINETSU HANDOTAI KK12 citations74
US5246528ASep 21, 1993
Automatic wafer etching method and apparatus
SHINETSU HANDOTAI KK18 citations74
US5538463AJul 23, 1996
Apparatus for bevelling wafer-edge
SHINETSU HANDOTAI KK14 citations73
US5458529AOct 17, 1995
Apparatus for polishing notch portion of wafer
SHINETSU HANDOTAI KK15 citations73
US5918587AJul 6, 1999
Method of producing slices
SHINETSU HANDOTAI KK16 citations72
US6332828B1Dec 25, 2001
Method of and apparatus for mirror-like polishing wafer chamfer with orientation flat
SHINETSU HANDOTAI KK10 citations71
US6113463ASep 5, 2000
Method of and apparatus for mirror-like polishing wafer chamfer with orientation flat
SHINETSU HANDOTAI KK6 citations71
US5298111AMar 29, 1994
Automatic wafer transfer apparatus and a method for transferring wafers and an etching drum
SHINETSU HANDOTAI KK4 citations63
US5766065AJun 16, 1998
Apparatus for polishing peripheral portion of wafer
SHINETSU HANDOTAI KK3 citations62