Inventor
INADA YASUO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “INADA YASUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU HANDOTAI KK
7 patentsUS5928066AJul 27, 1999
Apparatus for polishing peripheral portion of wafer
SHINETSU HANDOTAI KK19 citations92
US5733181AMar 31, 1998
Apparatus for polishing the notch of a wafer
SHINETSU HANDOTAI KK38 citations92
US5727990AMar 17, 1998
Method for mirror-polishing chamfered portion of wafer and mirror-polishing apparatus
SHINETSU HANDOTAI KK49 citations92
US5476413ADec 19, 1995
Apparatus for polishing the periphery portion of a wafer
SHINETSU HANDOTAI KK52 citations92
US6332828B1Dec 25, 2001
Method of and apparatus for mirror-like polishing wafer chamfer with orientation flat
SHINETSU HANDOTAI KK10 citations71
US6113463ASep 5, 2000
Method of and apparatus for mirror-like polishing wafer chamfer with orientation flat
SHINETSU HANDOTAI KK6 citations71
US5766065AJun 16, 1998
Apparatus for polishing peripheral portion of wafer
SHINETSU HANDOTAI KK3 citations62