Inventor
GUPTA SUBASH
US7 patents
⚠️ This page may combine multiple inventors who share the name “GUPTA SUBASH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
6 patentsUS5710067AJan 20, 1998
Silicon oxime film
ADVANCED MICRO DEVICES INC171 citations98
US5937319AAug 10, 1999
Method of making a metal oxide semiconductor (MOS) transistor polysilicon gate with a size beyond photolithography limitation by using polysilicidation and selective etching
ADVANCED MICRO DEVICES INC35 citations92
US5876903AMar 2, 1999
Virtual hard mask for etching
ADVANCED MICRO DEVICES INC43 citations92
US5807790ASep 15, 1998
Selective i-line BARL etch process
ADVANCED MICRO DEVICES INC25 citations92
US5885902AMar 23, 1999
Integrated arc and polysilicon etching process
ADVANCED MICRO DEVICES INC14 citations71
US5763327AJun 9, 1998
Integrated arc and polysilicon etching process
ADVANCED MICRO DEVICES INC11 citations71