Inventor
YIM RANDY
US3 patents
Patents
3 patentsUS5898478AApr 27, 1999
Method of using a test reticle to optimize alignment of integrated circuit process layers
LSI LOGIC CORP23 citations89
US5627624AMay 6, 1997
Integrated circuit test reticle and alignment mark optimization method
LSI LOGIC CORP40 citations89
US5329334AJul 12, 1994
Integrated circuit test reticle and alignment mark optimization method
LSI LOGIC CORP26 citations89