Inventor
NEVILLE CHRISTOPHER
US6 patents
⚠️ This page may combine multiple inventors who share the name “NEVILLE CHRISTOPHER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
5 patentsUS5898478AApr 27, 1999
Method of using a test reticle to optimize alignment of integrated circuit process layers
LSI LOGIC CORP23 citations89
US5627624AMay 6, 1997
Integrated circuit test reticle and alignment mark optimization method
LSI LOGIC CORP40 citations89
US5329334AJul 12, 1994
Integrated circuit test reticle and alignment mark optimization method
LSI LOGIC CORP26 citations89
US6426131B1Jul 30, 2002
Off-axis pupil aperture and method for making the same
LSI LOGIC CORP5 citations61
US7001695B2Feb 21, 2006
Multiple alternating phase shift technology for amplifying resolution
LSI LOGIC CORP0 citations50