Inventor
TOSHIMA MASATO
US21 patents
⚠️ This page may combine multiple inventors who share the name “TOSHIMA MASATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GAMMA PRECISION TECHNOLOGY INC
4 patentsUS6007675ADec 28, 1999
Wafer transfer system and method of using the same
GAMMA PRECISION TECHNOLOGY INC158 citations98
US5944940AAug 31, 1999
Wafer transfer system and method of using the same
GAMMA PRECISION TECHNOLOGY INC91 citations97
US5900105AMay 4, 1999
Wafer transfer system and method of using the same
GAMMA PRECISION TECHNOLOGY INC75 citations95
US5585729ADec 17, 1996
Fluid concentration detecting apparatus
GAMMA PRECISION TECHNOLOGY INC22 citations92
APPLIED MATERIALS INC
4 patentsUS5882165AMar 16, 1999
Multiple chamber integrated process system
APPLIED MATERIALS INC789 citations98
US5292393AMar 8, 1994
Multichamber integrated process system
APPLIED MATERIALS INC386 citations98
US4951601AAug 28, 1990
Multi-chamber integrated process system
APPLIED MATERIALS INC1,271 citations98
US4785962ANov 22, 1988
Vacuum chamber slit valve
APPLIED MATERIALS INC137 citations98
ORBOTECH LT SOLAR LLC
3 patentsUS7695233B2Apr 13, 2010
Substrate processing apparatus
ORBOTECH LT SOLAR LLC16 citations83
US9287152B2Mar 15, 2016
Auto-sequencing multi-directional inline processing method
ORBOTECH LT SOLAR LLC4 citations70
US10333104B2Jun 25, 2019
Method and apparatus for encapsulation of an organic light emitting diode
ORBOTECH LT SOLAR LLC0 citations51