P

Inventor

KAWADA KOJI

JP27 patents
⚠️ This page may combine multiple inventors who share the name “KAWADA KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJIKIN KK

16 patents
US5669408ASep 23, 1997

Pressure type flow rate control apparatus

FUJIKIN KK130 citations99
US5816285AOct 6, 1998

Pressure type flow rate control apparatus

FUJIKIN KK139 citations98
US5791369AAug 11, 1998

Pressure type flow rate control apparatus

FUJIKIN KK94 citations98
US6334962B1Jan 1, 2002

Low flow rate moisture supply process

FUJIKIN KK21 citations93
US6180067B1Jan 30, 2001

Reactor for the generation of water

FUJIKIN KK23 citations93
US6093662AJul 25, 2000

Method for generating water for semiconductor production

FUJIKIN KK35 citations93
US6733732B2May 11, 2004

Reactor for generating moisture

FUJIKIN KK21 citations92
US6274098B1Aug 14, 2001

Apparatus for the treatment of exhaust gases by combining hydrogen and oxygen

FUJIKIN KK19 citations84
US7103990B2Sep 12, 2006

Rotary silicon wafer cleaning apparatus

FUJIKIN KK8 citations74
US11079774B2Aug 3, 2021

Flow rate control device

FUJIKIN KK5 citations73
US11054052B2Jul 6, 2021

Piezoelectric-element-driven valve and flow rate control device

FUJIKIN KK4 citations73
US11346457B2May 31, 2022

Piezoelectric driven valve, pressure-type flow rate control device, and vaporization supply device

FUJIKIN KK1 citations63
US7595087B2Sep 29, 2009

Process of forming platinum coating catalyst layer in moisture-generating reactor

FUJIKIN KK2 citations63
US7673649B2Mar 9, 2010

Vacuum thermal insulating valve

FUJIKIN KK3 citations60
US11391608B2Jul 19, 2022

Self-diagnosis method for flow rate control device

FUJIKIN KK0 citations52
US11226257B2Jan 18, 2022

Anomaly detection device for fluid controller, anomaly detection system, anamoly detection method, and fluid controller

FUJIKIN KK0 citations50

STANLEY ELECTRIC CO LTD

3 patents

NEC CORP

2 patents

KINOSHITA SHINGO

2 patents

IBM

1 patent

ASAHI DENKA KOGYO KK

1 patent

MINAMI YUKIO

1 patent

NINTENDO CO LTD

1 patent