Inventor
CHEN TA-TE
TW4 patents
Patents
4 patentsUS6465369B1Oct 15, 2002
Method for stabilizing semiconductor degas temperature
MOSEL VITELIC INC25 citations85
US7358168B2Apr 15, 2008
Ion implantation method for forming a shallow junction
MOSEL VITELIC INC2 citations54
US7344998B2Mar 18, 2008
Wafer recovering method, wafer, and fabrication method
MOSEL VITELIC INC1 citations49
US7192789B2Mar 20, 2007
Method for monitoring an ion implanter
MOSEL VITELIC INC0 citations34