Inventor
LEE KEUM-JOO
KR11 patents
⚠️ This page may combine multiple inventors who share the name “LEE KEUM-JOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
10 patentsUS6717231B2Apr 6, 2004
Trench isolation regions having recess-inhibiting layers therein that protect against overetching
SAMSUNG ELECTRONICS CO LTD52 citations95
US6461937B1Oct 8, 2002
Methods of forming trench isolation regions having recess-inhibiting layers therein that protect against overetching
SAMSUNG ELECTRONICS CO LTD78 citations95
US6500726B2Dec 31, 2002
Shallow trench isolation type semiconductor device and method of forming the same
SAMSUNG ELECTRONICS CO LTD44 citations94
US6834440B2Dec 28, 2004
Wafer spin drying apparatus with a plurality of supply nozzles and methods for using the same
SAMSUNG ELECTRONICS CO LTD46 citations92
US6802911B2Oct 12, 2004
Method for cleaning damaged layers and polymer residue from semiconductor device
SAMSUNG ELECTRONICS CO LTD22 citations92
US6331478B1Dec 18, 2001
Methods for manufacturing semiconductor devices having chamfered metal silicide layers
SAMSUNG ELECTRONICS CO LTD25 citations89
US6699773B2Mar 2, 2004
Shallow trench isolation type semiconductor device and method of forming the same
SAMSUNG ELECTRONICS CO LTD10 citations72
US7629218B2Dec 8, 2009
Method of manufacturing a capacitor and method of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD5 citations62
US7582539B2Sep 1, 2009
Methods of cleaning a semiconductor device and methods of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD4 citations60
US12402302B2Aug 26, 2025
Semiconductor memory device and method for manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations47