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Inventor
SONG CHANG-LYOUNG
KR
2 patents
Patents
2 patents
US6500726B2
Dec 31, 2002
Shallow trench isolation type semiconductor device and method of forming the same
SAMSUNG ELECTRONICS CO LTD
44 citations
94
US6699773B2
Mar 2, 2004
Shallow trench isolation type semiconductor device and method of forming the same
SAMSUNG ELECTRONICS CO LTD
10 citations
72