Inventor
JOO JOON-YONG
KR7 patents
Patents
7 patentsUS6551887B2Apr 22, 2003
Method of forming a spacer
SAMSUNG ELECTRONICS CO LTD31 citations91
US6544861B2Apr 8, 2003
Method for forming isolation trench
SAMSUNG ELECTRONICS CO LTD20 citations90
US6146256ANov 14, 2000
Clamping wafer holder for chemical-mechanical planarization machines and method for using it
SAMSUNG ELECTRONICS CO LTD28 citations90
US6767814B2Jul 27, 2004
Semiconductor device having silicide thin film and method of forming the same
SAMSUNG ELECTRONICS CO LTD14 citations82
US6712672B1Mar 30, 2004
Clamping wafer holder for chemica-mechanical planarization machines and method for using it
SAMSUNG ELECTRONICS CO LTD14 citations82
US7492625B2Feb 17, 2009
Loadless SRAM
SAMSUNG ELECTRONICS CO LTD4 citations60
US7385260B2Jun 10, 2008
Semiconductor device having silicide thin film and method of forming the same
SAMSUNG ELECTRONICS CO LTD4 citations60