Inventor
PANDEY SUMIT
US8 patents
⚠️ This page may combine multiple inventors who share the name “PANDEY SUMIT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
3 patentsUS6443811B1Sep 3, 2002
Ceria slurry solution for improved defect control of silicon dioxide chemical-mechanical polishing
INFINEON TECHNOLOGIES AG40 citations91
US6429131B2Aug 6, 2002
CMP uniformity
INFINEON TECHNOLOGIES AG33 citations88
US6685796B1Feb 3, 2004
CMP uniformity
INFINEON TECHNOLOGIES AG11 citations72