Inventor
TATENO NORIAKI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TATENO NORIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOTO LTD
3 patentsUS6768627B1Jul 27, 2004
Electrostatic chuck and processing apparatus for insulative substrate
TOTO LTD63 citations93
US7209339B2Apr 24, 2007
Electrostatic chuck for an electrically insulative substrate, and a method of using same
TOTO LTD30 citations90
US7615133B2Nov 10, 2009
Electrostatic chuck module and cooling system
TOTO LTD33 citations88