Inventor
SCANLAN JOHN
IE9 patents
⚠️ This page may combine multiple inventors who share the name “SCANLAN JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCIENT SYSTEMS RES LTD
6 patentsUS7062411B2Jun 13, 2006
Method for process control of semiconductor manufacturing equipment
SCIENT SYSTEMS RES LTD71 citations95
US6656848B1Dec 2, 2003
Plasma chamber conditioning
SCIENT SYSTEMS RES LTD140 citations94
US6677246B2Jan 13, 2004
Endpoint detection in the etching of dielectric layers
SCIENT SYSTEMS RES LTD41 citations90
US6826489B2Nov 30, 2004
Fault classification in a plasma process chamber
SCIENT SYSTEMS RES LTD15 citations81
US6855209B2Feb 15, 2005
Plasma chamber cleaning
SCIENT SYSTEMS RES LTD2 citations62
US6781383B2Aug 24, 2004
Method for fault detection in a plasma process
SCIENT SYSTEMS RES LTD4 citations60