Inventor
HOPKINS MICHAEL B
IE4 patents
Patents
4 patentsUS6677246B2Jan 13, 2004
Endpoint detection in the etching of dielectric layers
SCIENT SYSTEMS RES LTD41 citations90
US6501285B1Dec 31, 2002
RF current sensor
SCIENT SYSTEMS RES LTD19 citations89
US6826489B2Nov 30, 2004
Fault classification in a plasma process chamber
SCIENT SYSTEMS RES LTD15 citations81
US6469488B1Oct 22, 2002
Method of processing a high frequency signal containing multiple fundamental frequencies
SCIENT SYSTEMS RES LTD12 citations64