Inventor

YEN YEONG-SONG

TW3 patents

Patents

3 patents

US6839126B2Jan 4, 2005

Photolithography process with multiple exposures

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US6391757B1May 21, 2002

Dual damascene process

UNITED MICROELECTRONICS CORP17 citations82

US6833318B2Dec 21, 2004

Gap-filling process

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