Inventor
HUNG KUEI-CHUN
TW13 patents
Patents
13 patentsUS6589881B2Jul 8, 2003
Method of forming dual damascene structure
UNITED MICROELECTRONICS CORP23 citations92
US6458705B1Oct 1, 2002
Method for forming via-first dual damascene interconnect structure
UNITED MICROELECTRONICS CORP44 citations92
US6337269B1Jan 8, 2002
Method of fabricating a dual damascene structure
UNITED MICROELECTRONICS CORP22 citations92
US6839126B2Jan 4, 2005
Photolithography process with multiple exposures
UNITED MICROELECTRONICS CORP13 citations82
US6638664B2Oct 28, 2003
Optical mask correction method
UNITED MICROELECTRONICS CORP7 citations71
US9007571B2Apr 14, 2015
Measurement method of overlay mark
UNITED MICROELECTRONICS CORP5 citations69
US11482517B2Oct 25, 2022
Integrated circuit
UNITED MICROELECTRONICS CORP1 citations62
US9905562B2Feb 27, 2018
Semiconductor integrated circuit layout structure
UNITED MICROELECTRONICS CORP0 citations51
US9673145B2Jun 6, 2017
Semiconductor integrated circuit layout structure
UNITED MICROELECTRONICS CORP0 citations51
US7101796B2Sep 5, 2006
Method for forming a plane structure
UNITED MICROELECTRONICS CORP0 citations51
US6624055B1Sep 23, 2003
Method for forming a plane structure
UNITED MICROELECTRONICS CORP0 citations51
US9524362B2Dec 20, 2016
Method of decomposing layout for generating patterns on photomasks
UNITED MICROELECTRONICS CORP1 citations50
US9653346B2May 16, 2017
Integrated FinFET structure having a contact plug pitch larger than fin and first metal pitch
UNITED MICROELECTRONICS CORP0 citations40