Inventor
CHANG CHING-HSU
TW15 patents
⚠️ This page may combine multiple inventors who share the name “CHANG CHING-HSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
6 patentsUS11048161B2Jun 29, 2021
Optical proximity correction methodology using pattern classification for target placement
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10360339B2Jul 23, 2019
Method for integrated circuit manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11901286B2Feb 13, 2024
Diagonal via pattern and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10747938B2Aug 18, 2020
Method for integrated circuit manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10527928B2Jan 7, 2020
Optical proximity correction methodology using pattern classification for target placement
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9880460B2Jan 30, 2018
Enhanced EUV lithography system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
UNITED MICROELECTRONICS CORP
3 patentsUS6589881B2Jul 8, 2003
Method of forming dual damascene structure
UNITED MICROELECTRONICS CORP23 citations92
US6839126B2Jan 4, 2005
Photolithography process with multiple exposures
UNITED MICROELECTRONICS CORP13 citations82
US6391757B1May 21, 2002
Dual damascene process
UNITED MICROELECTRONICS CORP17 citations82
TAIWAN SEMICONDUCTOR MFG
3 patentsUS9262578B2Feb 16, 2016
Method for integrated circuit manufacturing
TAIWAN SEMICONDUCTOR MFG9 citations83
US9395618B2Jul 19, 2016
Enhanced EUV lithography system
TAIWAN SEMICONDUCTOR MFG1 citations62
US9298083B2Mar 29, 2016
Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof
TAIWAN SEMICONDUCTOR MFG2 citations62