Inventor
CHOI SANG-KOOK
KR9 patents
⚠️ This page may combine multiple inventors who share the name “CHOI SANG-KOOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
8 patentsUS6207588B1Mar 27, 2001
Method for simultaneously forming thinner and thicker parts of a dual oxide layer having varying thicknesses
SAMSUNG ELECTRONICS CO LTD17 citations88
US6068316AMay 30, 2000
Large diameter wafer conveying system and method thereof
SAMSUNG ELECTRONICS CO LTD17 citations84
US6837619B2Jan 4, 2005
Furnace temperature detector
SAMSUNG ELECTRONICS CO LTD7 citations73
US5704984AJan 6, 1998
Chemical vapor deposition apparatus with a heat radiation structure
SAMSUNG ELECTRONICS CO LTD8 citations70
US6340625B1Jan 22, 2002
Method for simultaneously forming thinner and thicker parts of a dual oxide layer having varying thicknesses
SAMSUNG ELECTRONICS CO LTD7 citations69
US5780317AJul 14, 1998
Apparatus for forming oxide film of semiconductor device
SAMSUNG ELECTRONICS CO LTD3 citations60
US5753046AMay 19, 1998
Vertical diffusion furnace and cap therefor
SAMSUNG ELECTRONICS CO LTD6 citations60
US5616025AApr 1, 1997
Vertical diffusion furnace having improved gas flow
SAMSUNG ELECTRONICS CO LTD3 citations58