Inventor
JOO KAZUHIRO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “JOO KAZUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
5 patentsUS6069096AMay 30, 2000
Operating method of vacuum processing system and vacuum processing system
HITACHI LTD40 citations92
US6941185B2Sep 6, 2005
Operating method of vacuum processing system and vacuum processing system
HITACHI LTD11 citations73
US6853872B2Feb 8, 2005
Operating method of vacuum processing system and vacuum processing system
HITACHI LTD10 citations73
US6714832B1Mar 30, 2004
Operating method of vacuum processing system and vacuum processing system
HITACHI LTD12 citations73
US6885906B2Apr 26, 2005
Operating method of vacuum processing system and vacuum processing system
HITACHI LTD2 citations62