Inventor
OKIGUCHI SHOJI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “OKIGUCHI SHOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
9 patentsUS6745093B1Jun 1, 2004
Vacuum process apparatus and method of operating the same
HITACHI LTD19 citations92
US6069096AMay 30, 2000
Operating method of vacuum processing system and vacuum processing system
HITACHI LTD40 citations92
US6920369B2Jul 19, 2005
Methods of operating vacuum processing equipment and methods of processing wafers
HITACHI LTD17 citations91
US6795745B1Sep 21, 2004
Methods of operating vacuum processing equipment and methods of processing wafers
HITACHI LTD26 citations91
US6917844B2Jul 12, 2005
Vacuum process apparatus and method of operating the same
HITACHI LTD13 citations83
US6941185B2Sep 6, 2005
Operating method of vacuum processing system and vacuum processing system
HITACHI LTD11 citations73
US6853872B2Feb 8, 2005
Operating method of vacuum processing system and vacuum processing system
HITACHI LTD10 citations73
US6714832B1Mar 30, 2004
Operating method of vacuum processing system and vacuum processing system
HITACHI LTD12 citations73
US6885906B2Apr 26, 2005
Operating method of vacuum processing system and vacuum processing system
HITACHI LTD2 citations62