Inventor
YOON CHEOL-NAM
KR4 patents
Patents
4 patentsUS7442112B2Oct 28, 2008
Nozzle for spraying sublimable solid particles entrained in gas for cleaning surface
K C TECH CO LTD64 citations93
US7762869B2Jul 27, 2010
Nozzle for spraying sublimable solid particles entrained in gas for cleaning surface
K C TECH CO LTD23 citations88
US7270136B2Sep 18, 2007
Apparatus for cleaning the edges of wafers
K C TECH CO LTD10 citations79
US7008306B2Mar 7, 2006
Nozzle for injecting sublimable solid particles entrained in gas for cleaning a surface
K C TECH CO LTD2 citations60