Inventor
KO SE-JONG
KR9 patents
⚠️ This page may combine multiple inventors who share the name “KO SE-JONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
7 patentsUS6232228B1May 15, 2001
Method of manufacturing semiconductor devices, etching composition for manufacturing semiconductor devices, and semiconductor devices made using the method
SAMSUNG ELECTRONICS CO LTD77 citations95
US6436809B1Aug 20, 2002
Method of manufacturing semiconductor devices, etching compositions for manufacturing semiconductor devices, and semiconductor devices made using this method
SAMSUNG ELECTRONICS CO LTD19 citations91
US6140233AOct 31, 2000
Method of manufacturing semiconductor devices, etching compositions for manufacturing semiconductor devices, and semiconductor devices thereby
SAMSUNG ELECTRONICS CO LTD32 citations91
US6059986AMay 9, 2000
Wet station apparatus having quartz heater monitoring system and method of monitoring thereof
SAMSUNG ELECTRONICS CO LTD11 citations71
US5843850ADec 1, 1998
Method of stripping a nitride layer from a wafer and wet etching apparatus using the same
SAMSUNG ELECTRONICS CO LTD10 citations67
US5827396AOct 27, 1998
Device for turning a wafer during a wet etching process
SAMSUNG ELECTRONICS CO LTD5 citations58
US5944939AAug 31, 1999
Wet station apparatus having quartz heater monitoring system and method of monitoring thereof
SAMSUNG ELECTRONICS CO LTD0 citations49