Inventor
BUTTERFIELD PAUL D
US49 patents
⚠️ This page may combine multiple inventors who share the name “BUTTERFIELD PAUL D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
44 patentsUS6962524B2Nov 8, 2005
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC80 citations97
US7422516B2Sep 9, 2008
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC42 citations96
US6991528B2Jan 31, 2006
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC45 citations96
US7182680B2Feb 27, 2007
Apparatus for conditioning processing pads
APPLIED MATERIALS INC15 citations93
US6447374B1Sep 10, 2002
Chemical mechanical planarization system
APPLIED MATERIALS INC39 citations93
US7278911B2Oct 9, 2007
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC33 citations92
US7160432B2Jan 9, 2007
Method and composition for polishing a substrate
APPLIED MATERIALS INC21 citations92
US7066800B2Jun 27, 2006
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC31 citations92
US6988942B2Jan 24, 2006
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC41 citations92
US6884153B2Apr 26, 2005
Apparatus for electrochemical processing
APPLIED MATERIALS INC30 citations92
US6841057B2Jan 11, 2005
Method and apparatus for substrate polishing
APPLIED MATERIALS INC21 citations92
US11446711B2Sep 20, 2022
Steam treatment stations for chemical mechanical polishing system
APPLIED MATERIALS INC8 citations85
US7608173B2Oct 27, 2009
Biased retaining ring
APPLIED MATERIALS INC12 citations84
US7374644B2May 20, 2008
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC13 citations84
US7207878B2Apr 24, 2007
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC11 citations84
US7137879B2Nov 21, 2006
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC7 citations74
US6977036B2Dec 20, 2005
Method and apparatus for substrate polishing
APPLIED MATERIALS INC6 citations74
US6679755B1Jan 20, 2004
Chemical mechanical planarization system
APPLIED MATERIALS INC9 citations74
US6645050B1Nov 11, 2003
Multimode substrate carrier
APPLIED MATERIALS INC12 citations74
US10562147B2Feb 18, 2020
Polishing system with annular platen or polishing pad for substrate monitoring
APPLIED MATERIALS INC4 citations73
US10076817B2Sep 18, 2018
Orbital polishing with small pad
APPLIED MATERIALS INC3 citations73
US9358658B2Jun 7, 2016
Polishing system with front side pressure control
APPLIED MATERIALS INC4 citations73
US11633833B2Apr 25, 2023
Use of steam for pre-heating of CMP components
APPLIED MATERIALS INC3 citations72
US9687960B2Jun 27, 2017
Polishing pad cleaning systems employing fluid outlets oriented to direct fluid under spray bodies and towards inlet ports, and related methods
APPLIED MATERIALS INC5 citations72
US9452506B2Sep 27, 2016
Vacuum cleaning systems for polishing pads, and related methods
APPLIED MATERIALS INC3 citations72
US11077536B2Aug 3, 2021
Slurry distribution device for chemical mechanical polishing
APPLIED MATERIALS INC2 citations71
US10967483B2Apr 6, 2021
Slurry distribution device for chemical mechanical polishing
APPLIED MATERIALS INC2 citations71
US9308623B2Apr 12, 2016
Multi-disk chemical mechanical polishing pad conditioners and methods
APPLIED MATERIALS INC3 citations70
US11780046B2Oct 10, 2023
Polishing system with annular platen or polishing pad
APPLIED MATERIALS INC0 citations63
US11511388B2Nov 29, 2022
Polishing system with support post and annular platen or polishing pad
APPLIED MATERIALS INC0 citations63
US7666061B2Feb 23, 2010
Method for conditioning processing pads
APPLIED MATERIALS INC4 citations63
US7040964B2May 9, 2006
Polishing media stabilizer
APPLIED MATERIALS INC3 citations63
US12459011B2Nov 4, 2025
Steam treatment stations for chemical mechanical polishing system
APPLIED MATERIALS INC0 citations62
US12030093B2Jul 9, 2024
Steam treatment stations for chemical mechanical polishing system
APPLIED MATERIALS INC0 citations62
US11628478B2Apr 18, 2023
Steam cleaning of CMP components
APPLIED MATERIALS INC0 citations62
US11986926B2May 21, 2024
Slurry distribution device for chemical mechanical polishing
APPLIED MATERIALS INC0 citations61
US11806835B2Nov 7, 2023
Slurry distribution device for chemical mechanical polishing
APPLIED MATERIALS INC0 citations61
US7344432B2Mar 18, 2008
Conductive pad with ion exchange membrane for electrochemical mechanical polishing
APPLIED MATERIALS INC3 citations60
US9808906B2Nov 7, 2017
Polishing system with front side pressure control
APPLIED MATERIALS INC0 citations52
US7828626B2Nov 9, 2010
Apparatus for conditioning processing pads
APPLIED MATERIALS INC0 citations52
US7678245B2Mar 16, 2010
Method and apparatus for electrochemical mechanical processing
APPLIED MATERIALS INC0 citations52
US7311592B2Dec 25, 2007
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC1 citations52
US12392427B2Aug 19, 2025
Insulated fluid lines in chemical mechanical polishing
APPLIED MATERIALS INC0 citations50
US11833637B2Dec 5, 2023
Control of steam generation for chemical mechanical polishing
APPLIED MATERIALS INC0 citations48