Inventor
HU YONQI
US3 patents
Patents
3 patentsUS6962524B2Nov 8, 2005
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC80 citations97
US7422516B2Sep 9, 2008
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC42 citations96
US7278911B2Oct 9, 2007
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC33 citations92