Inventor
MANENS ANTOINE P
US27 patents
⚠️ This page may combine multiple inventors who share the name “MANENS ANTOINE P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
24 patentsUS6848970B2Feb 1, 2005
Process control in electrochemically assisted planarization
APPLIED MATERIALS INC130 citations99
US6962524B2Nov 8, 2005
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC80 citations97
US7422516B2Sep 9, 2008
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC42 citations96
US6991528B2Jan 31, 2006
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC45 citations96
US7278911B2Oct 9, 2007
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC33 citations92
US7186164B2Mar 6, 2007
Processing pad assembly with zone control
APPLIED MATERIALS INC25 citations92
US6884153B2Apr 26, 2005
Apparatus for electrochemical processing
APPLIED MATERIALS INC30 citations92
US8043870B2Oct 25, 2011
CMP pad thickness and profile monitoring system
APPLIED MATERIALS INC18 citations84
US7790015B2Sep 7, 2010
Endpoint for electroprocessing
APPLIED MATERIALS INC8 citations84
US7655565B2Feb 2, 2010
Electroprocessing profile control
APPLIED MATERIALS INC8 citations84
US7608173B2Oct 27, 2009
Biased retaining ring
APPLIED MATERIALS INC12 citations84
US7374644B2May 20, 2008
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC13 citations84
US7207878B2Apr 24, 2007
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC11 citations84
US7520795B2Apr 21, 2009
Grooved retaining ring
APPLIED MATERIALS INC8 citations81
US7276743B2Oct 2, 2007
Retaining ring with conductive portion
APPLIED MATERIALS INC11 citations81
US7294038B2Nov 13, 2007
Process control in electrochemically assisted planarization
APPLIED MATERIALS INC4 citations74
US7070475B2Jul 4, 2006
Process control in electrochemically assisted planarization
APPLIED MATERIALS INC9 citations74
US7628905B2Dec 8, 2009
Algorithm for real-time process control of electro-polishing
APPLIED MATERIALS INC2 citations63
US7303462B2Dec 4, 2007
Edge bead removal by an electro polishing process
APPLIED MATERIALS INC5 citations63
US7112270B2Sep 26, 2006
Algorithm for real-time process control of electro-polishing
APPLIED MATERIALS INC3 citations63
US7709382B2May 4, 2010
Electroprocessing profile control
APPLIED MATERIALS INC2 citations62
US11009801B2May 18, 2021
Dynamic cooling control for thermal stabilization for lithography system
APPLIED MATERIALS INC0 citations56
US10788762B2Sep 29, 2020
Dynamic cooling control for thermal stabilization for lithography system
APPLIED MATERIALS INC1 citations56
US10451564B2Oct 22, 2019
Empirical detection of lens aberration for diffraction-limited optical system
APPLIED MATERIALS INC0 citations51