Inventor
GOTO SHIGEHIRO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “GOTO SHIGEHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
7 patentsUS8003919B2Aug 23, 2011
Substrate heat treatment apparatus
DAINIPPON SCREEN MFG481 citations98
US7432476B2Oct 7, 2008
Substrate heat treatment apparatus
DAINIPPON SCREEN MFG502 citations98
US6827782B2Dec 7, 2004
Chemical treating apparatus
DAINIPPON SCREEN MFG30 citations92
US6440218B1Aug 27, 2002
Coating solution applying method and apparatus
DAINIPPON SCREEN MFG38 citations91
US7267723B2Sep 11, 2007
Treating solution supply nozzle, a substrate treating apparatus having this nozzle, and a method of manufacturing a treating solution supply nozzle
DAINIPPON SCREEN MFG10 citations84
US7718925B2May 18, 2010
Substrate heat treatment apparatus
DAINIPPON SCREEN MFG16 citations82
US7628862B2Dec 8, 2009
Treating solution supply nozzle, a substrate treating apparatus having this nozzle, and a method of manufacturing a treating solution supply nozzle
DAINIPPON SCREEN MFG2 citations62
SCREEN HOLDINGS CO LTD
3 patentsUS10651056B2May 12, 2020
Treating liquid vaporizing apparatus
SCREEN HOLDINGS CO LTD1 citations62
US10629463B2Apr 21, 2020
Thermal processing apparatus and thermal processing method
SCREEN HOLDINGS CO LTD0 citations38
US10214814B2Feb 26, 2019
Substrate treating apparatus and treatment gas supplying nozzle
SCREEN HOLDINGS CO LTD0 citations38