Inventor
KRAUSE STEPHEN E
US5 patents
Patents
5 patentsUS8000080B2Aug 16, 2011
Particle trap
VARIAN SEMICONDUCTOR EQUIPMENT8 citations82
US7482598B2Jan 27, 2009
Techniques for preventing parasitic beamlets from affecting ion implantation
VARIAN SEMICONDUCTOR EQUIPMENT3 citations60
US7476878B2Jan 13, 2009
Techniques for reducing effects of photoresist outgassing
VARIAN SEMICONDUCTOR EQUIPMENT0 citations50
US7821213B2Oct 26, 2010
Techniques for controlling a charged particle beam
VARIAN SEMICONDUCTOR EQUIPMENT0 citations49
US7863531B2Jan 4, 2011
Techniques for making high voltage connections
VARIAN SEMICONDUCTOR EQUIPMENT0 citations48