Inventor

HERMANSON ERIC D

US21 patents

⚠️ This page may combine multiple inventors who share the name “HERMANSON ERIC D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HERMANSON ERIC D

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Dual cathode ion source

Conductive beam optic containing internal heating element

Dual cathode ion source

Dual cathode ion source

Ion beam quality control using a movable mass resolving device

Foam in ion implantation system

Dual cathode ion source

Linkage conduit for vacuum chamber applications

Foam in ion implantation system

Cryopump arrangement for improved pump speed

APPLIED MATERIALS INC

Electrostatic filter providing reduced particle generation

High-current ion implanter and method for controlling ion beam using high-current ion implanter

Electrostatic filter and ion implanter having asymmetric electrostatic configuration

Particle yield via beam-line pressure control

System using pixelated faraday sensor

Cover ring to mitigate carbon contamination in plasma doping chamber

VARIAN SEMICONDUCTOR EQUIPMENT

Adjustable conductance limiting aperture for ion implanters

Techniques for preventing parasitic beamlets from affecting ion implantation

Techniques for reducing effects of photoresist outgassing

OLSON JOSEPH C

Methods and apparatus for ion beam angle measurement in two dimensions

CITVER GREGORY

Techniques for protecting a superconducting (SC) tape