Inventor
HASEGAWA TOSHIO
US48 patents
⚠️ This page may combine multiple inventors who share the name “HASEGAWA TOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
27 patentsUS7776733B2Aug 17, 2010
Method for depositing titanium nitride films for semiconductor manufacturing
TOKYO ELECTRON LTD63 citations98
US10361366B2Jul 23, 2019
Resistive random accress memory containing a conformal titanium aluminum carbide film and method of making
TOKYO ELECTRON LTD324 citations96
US6773687B1Aug 10, 2004
Exhaust apparatus for process apparatus and method of removing impurity gas
TOKYO ELECTRON LTD27 citations92
US7022298B2Apr 4, 2006
Exhaust apparatus for process apparatus and method of removing impurity gas
TOKYO ELECTRON LTD12 citations84
US9330936B2May 3, 2016
Method for depositing metal layers on germanium-containing films using metal chloride precursors
TOKYO ELECTRON LTD6 citations73
US9101067B2Aug 4, 2015
Method for forming copper wiring
TOKYO ELECTRON LTD4 citations73
US11873560B2Jan 16, 2024
Abnormality detection system and control board
TOKYO ELECTRON LTD2 citations72
US11450512B2Sep 20, 2022
Plasma processing method
TOKYO ELECTRON LTD2 citations72
US11915931B2Feb 27, 2024
Extreme ultraviolet lithography patterning method
TOKYO ELECTRON LTD2 citations71
US9607888B2Mar 28, 2017
Integration of ALD barrier layer and CVD Ru liner for void-free Cu filling
TOKYO ELECTRON LTD2 citations71
US11081322B2Aug 3, 2021
Film forming apparatus, cleaning method for film forming apparatus and recording medium
TOKYO ELECTRON LTD5 citations70
US12404582B2Sep 2, 2025
Method and apparatus for embedding ruthenium in recess formed on substrate surface
TOKYO ELECTRON LTD0 citations63
US7985680B2Jul 26, 2011
Method of forming aluminum-doped metal carbonitride gate electrodes
TOKYO ELECTRON LTD3 citations63
US7776742B2Aug 17, 2010
Film-forming method
TOKYO ELECTRON LTD3 citations63
US7589020B2Sep 15, 2009
Method for depositing titanium nitride films for semiconductor manufacturing
TOKYO ELECTRON LTD2 citations63
US6448181B2Sep 10, 2002
Method for forming film
TOKYO ELECTRON LTD2 citations63
US11387112B2Jul 12, 2022
Surface processing method and processing system
TOKYO ELECTRON LTD1 citations62
US12494369B2Dec 9, 2025
Extreme ultraviolet lithography patterning method
TOKYO ELECTRON LTD0 citations61
US10199268B2Feb 5, 2019
Film forming method and film forming system
TOKYO ELECTRON LTD1 citations60
US12509770B2Dec 30, 2025
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations52
US9698020B2Jul 4, 2017
CMOS Vt control integration by modification of metal-containing gate electrodes
TOKYO ELECTRON LTD0 citations52
US7935384B2May 3, 2011
Film forming method
TOKYO ELECTRON LTD1 citations52
US10872764B2Dec 22, 2020
Film forming method
TOKYO ELECTRON LTD0 citations51
US10535528B2Jan 14, 2020
Method of forming titanium oxide film and method of forming hard mask
TOKYO ELECTRON LTD0 citations51
US7989353B2Aug 2, 2011
Method for in-situ refurbishing a ceramic substrate holder
TOKYO ELECTRON LTD0 citations50
US7514120B2Apr 7, 2009
Precoat film forming method
TOKYO ELECTRON LTD0 citations42
US8846474B2Sep 30, 2014
Dual workfunction semiconductor devices and methods for forming thereof
TOKYO ELECTRON LTD0 citations41
TOKYO KIKAI SEISAKUSHO LTD
7 patentsUS6673004B2Jan 6, 2004
Cutting and folding mechanism for a web-fed rotary press
TOKYO KIKAI SEISAKUSHO LTD16 citations79
US6689031B2Feb 10, 2004
Paper cutting apparatus for folder
TOKYO KIKAI SEISAKUSHO LTD7 citations73
US6740024B2May 25, 2004
Jaw cylinder device at the folding station of a web-fed printing press
TOKYO KIKAI SEISAKUSHO LTD6 citations62
US6659931B2Dec 9, 2003
Jaw device for rotary-press folding section
TOKYO KIKAI SEISAKUSHO LTD2 citations62
US6349646B1Feb 26, 2002
Blanket-mounting mechanism of printing press
TOKYO KIKAI SEISAKUSHO LTD2 citations62
US6709376B2Mar 23, 2004
Jaw cylinder in jaw folder
TOKYO KIKAI SEISAKUSHO LTD2 citations60
US6637331B2Oct 28, 2003
Printing blanket having reinforcing band sheets on opposite end portions
TOKYO KIKAI SEISAKUSHO LTD0 citations51
MITSUBISHI ELECTRIC CORP
3 patentsUS7894604B2Feb 22, 2011
Quantum cryptographic communication apparatus
MITSUBISHI ELECTRIC CORP38 citations90
US7649996B2Jan 19, 2010
Cryptographic communication apparatus
MITSUBISHI ELECTRIC CORP41 citations90
US6778314B2Aug 17, 2004
Phase modulator and phase modulating method
MITSUBISHI ELECTRIC CORP3 citations60
HITACHI CONSTRUCTION MACHINERY
3 patentsUS6273632B1Aug 14, 2001
Joint pin lock mechanism for pivotal pin joint
HITACHI CONSTRUCTION MACHINERY30 citations89
US6564480B1May 20, 2003
Working apparatus for construction machine
HITACHI CONSTRUCTION MACHINERY9 citations72
US5525028AJun 11, 1996
Offset boom type construction machine
HITACHI CONSTRUCTION MACHINERY13 citations72