Inventor
CORNELISSEN SEBASTIAAN MARIA J
NL5 patents
Patents
5 patentsUS7359032B2Apr 15, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV17 citations90
US6906786B2Jun 14, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV23 citations90
US7633073B2Dec 15, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations72
US7072025B2Jul 4, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations50
US7184128B2Feb 27, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations49