Inventor
SMITS PETER
NL13 patents
⚠️ This page may combine multiple inventors who share the name “SMITS PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS7791709B2Sep 7, 2010
Substrate support and lithographic process
ASML NETHERLANDS BV11 citations82
US7583357B2Sep 1, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations82
US7684010B2Mar 23, 2010
Lithographic apparatus, device manufacturing method, seal structure, method of removing an object and a method of sealing
ASML NETHERLANDS BV15 citations81
US7365827B2Apr 29, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations81
US7928407B2Apr 19, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations73
US7633073B2Dec 15, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations72
US7755742B2Jul 13, 2010
Lithographic apparatus with mounted sensor
ASML NETHERLANDS BV2 citations57