Inventor

YAMASHITA ASAO

US22 patents

⚠️ This page may combine multiple inventors who share the name “YAMASHITA ASAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YAMASHITA ASAO

TOKYO ELECTRON LTD

Multi-layer/multi-input/multi-output (MLMIMO) models and method for using

Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models for metal-gate structures

Iso/nested control for soft mask processing

Formula-based run-to-run control

Iso/nested cascading trim control with model feedback updates

Creating multi-layer/multi-input/multi-output (MLMIMO) models for metal-gate structures

Method for conditioning a process chamber

Method and apparatus for creating a gate optimization evaluation library

Processing system and method for chemically treating a TERA layer

System and method for etching a mask

Method and apparatus for spacer-optimization (S-O)

Plasma processing apparatus

Method and system for performing a chemical oxide removal process

Method and apparatus for creating a Spacer-Optimization (S-O) library

Methods and apparatus for changing the optical properties of resists

Dry etching method

TOKYO ELECTON LTD

Method and apparatus for optimizing a gate channel

YAMAZAWA YOHEI

Plasma processing apparatus

MORIYA TSUYOSHI

Filtration filter and production method therefor

FUNK MERRITT

Creating metal gate structures using Lithography-Etch-Lithography-Etch (LELE) processing sequences

LUONG VINH HOANG

Differential metal gate etching process

TOMOYASU MASAYUKI

Method and system for performing a chemical oxide removal process