Inventor
KUBOTA KAZUHIRO
JP41 patents
⚠️ This page may combine multiple inventors who share the name “KUBOTA KAZUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
15 patentsUS6190495B1Feb 20, 2001
Magnetron plasma processing apparatus
TOKYO ELECTRON LTD81 citations95
US8048687B2Nov 1, 2011
Processing method for recovering a damaged low-k film of a substrate and storage medium
TOKYO ELECTRON LTD10 citations84
US9390935B2Jul 12, 2016
Etching method
TOKYO ELECTRON LTD5 citations73
US7556970B2Jul 7, 2009
Method of repairing damaged film having low dielectric constant, semiconductor device fabricating system and storage medium
TOKYO ELECTRON LTD6 citations63
US7393460B2Jul 1, 2008
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD5 citations63
US7799703B2Sep 21, 2010
Processing method and storage medium
TOKYO ELECTRON LTD3 citations61
US8021564B2Sep 20, 2011
Method for detecting an end point of resist peeling, method and apparatus for peeling resist, and computer-readable storage medium
TOKYO ELECTRON LTD4 citations59
US10886097B2Jan 5, 2021
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations52
US9396968B2Jul 19, 2016
Etching method and etching apparatus
TOKYO ELECTRON LTD0 citations52
US9330930B2May 3, 2016
Plasma etching method and semiconductor device manufacturing method
TOKYO ELECTRON LTD1 citations52
US9257301B2Feb 9, 2016
Method of etching silicon oxide film
TOKYO ELECTRON LTD0 citations52
US9887109B2Feb 6, 2018
Plasma etching method and plasma etching apparatus
TOKYO ELECTRON LTD0 citations51
US9881806B2Jan 30, 2018
Method of manufacturing a semiconductor device
TOKYO ELECTRON LTD0 citations51
US9318340B2Apr 19, 2016
Method of manufacturing a semiconductor device
TOKYO ELECTRON LTD0 citations51
US9279184B2Mar 8, 2016
Method of forming a pattern and substrate processing system
TOKYO ELECTRON LTD0 citations46
YAZAKI CORP
6 patentsUS6400110B1Jun 4, 2002
Wiper control apparatus
YAZAKI CORP20 citations92
US6577091B2Jun 10, 2003
Wiper control apparatus
YAZAKI CORP6 citations63
US7902806B2Mar 8, 2011
Load control unit
YAZAKI CORP4 citations61
US7768759B2Aug 3, 2010
Control circuit of semiconductor device having over-heat protecting function
YAZAKI CORP3 citations61
US6586848B2Jul 1, 2003
Function selecting control system
YAZAKI CORP0 citations51
US11027612B2Jun 8, 2021
Vehicle power supply system
YAZAKI CORP0 citations49
HITACHI LTD
4 patentsUS5003663AApr 2, 1991
Upright-type electric vacuum cleaner
HITACHI LTD22 citations92
US4905341AMar 6, 1990
Upright-type electric vacuum cleaner
HITACHI LTD31 citations92
US4809394AMar 7, 1989
Vacuum cleaner having a blower facility structure
HITACHI LTD54 citations92
US4893376AJan 16, 1990
Upright-type electric vacuum cleaner
HITACHI LTD11 citations74