Inventor

KOIKE SATORU

JP5 patents

⚠️ This page may combine multiple inventors who share the name “KOIKE SATORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents

US10429263B2Oct 1, 2019

Pressure measuring device and exhaust system using the same, and substrate processing apparatus

TOKYO ELECTRON LTD0 citations49

US10720312B2Jul 21, 2020

Substrate processing apparatus

TOKYO ELECTRON LTD0 citations36

US9360390B2Jun 7, 2016

Pressure measuring instrument and substrate processing apparatus provided with the pressure measuring instrument

TOKYO ELECTRON LTD0 citations34

US10550471B2Feb 4, 2020

Mixed gas multiple line supply system and substrate processing apparatus using same

TOKYO ELECTRON LTD0 citations29

KANEHARA MIE

1 patent

US8158077B2Apr 17, 2012

Composition for detection and model for evaluation of food packaging material using the same

KANEHARA MIE2 citations52