Inventor

POON TZE

US3 patents

⚠️ This page may combine multiple inventors who share the name “POON TZE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHOI DONGWON

1 patent

US8642128B2Feb 4, 2014

Enhanced scavenging of residual fluorine radicals using silicon coating on process chamber walls

CHOI DONGWON4 citations65

APPLIED MATERIALS INC

1 patent

US7858503B2Dec 28, 2010

Ion implanted substrate having capping layer and method

APPLIED MATERIALS INC2 citations55

DEL AGUA BORNIQUEL JOSE IGNACIO

1 patent

US8198180B2Jun 12, 2012

Ion implanted substrate having capping layer and method

DEL AGUA BORNIQUEL JOSE IGNACIO0 citations38