Inventor
FOAD MAJEED
US22 patents
⚠️ This page may combine multiple inventors who share the name “FOAD MAJEED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUS5969366AOct 19, 1999
Ion implanter with post mass selection deceleration
APPLIED MATERIALS INC67 citations95
US9632411B2Apr 25, 2017
Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor
APPLIED MATERIALS INC26 citations93
US7225047B2May 29, 2007
Method, system and medium for controlling semiconductor wafer processes using critical dimension measurements
APPLIED MATERIALS INC46 citations92
US7078302B2Jul 18, 2006
Gate electrode dopant activation method for semiconductor manufacturing including a laser anneal
APPLIED MATERIALS INC28 citations91
US9829805B2Nov 28, 2017
Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor
APPLIED MATERIALS INC14 citations83
US9354508B2May 31, 2016
Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor
APPLIED MATERIALS INC5 citations83
US6501081B1Dec 31, 2002
Electron flood apparatus for neutralizing charge build up on a substrate during ion implantation
APPLIED MATERIALS INC18 citations77
US10209613B2Feb 19, 2019
System and method for manufacturing planarized extreme ultraviolet lithography blank
APPLIED MATERIALS INC2 citations72
US7993465B2Aug 9, 2011
Electrostatic chuck cleaning during semiconductor substrate processing
APPLIED MATERIALS INC6 citations68
US7611976B2Nov 3, 2009
Gate electrode dopant activation method for semiconductor manufacturing
APPLIED MATERIALS INC3 citations61
US7858503B2Dec 28, 2010
Ion implanted substrate having capping layer and method
APPLIED MATERIALS INC2 citations55
US10788744B2Sep 29, 2020
Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor
APPLIED MATERIALS INC0 citations52
US10551731B2Feb 4, 2020
Glass ceramic for ultraviolet lithography and method of manufacturing thereof
APPLIED MATERIALS INC0 citations52
US10012897B2Jul 3, 2018
Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor
APPLIED MATERIALS INC0 citations51
UNIV CALIFORNIA
3 patentsUS6498078B2Dec 24, 2002
Method for enhancing the solubility of boron and indium in silicon
UNIV CALIFORNIA2 citations57
US6617228B2Sep 9, 2003
Semiconductor material and method for enhancing solubility of a dopant therein
UNIV CALIFORNIA2 citations56
US6872455B2Mar 29, 2005
Semiconductor material and method for enhancing solubility of a dopant therein
UNIV CALIFORNIA0 citations46