Inventor

SHEA KEVIN R

US47 patents

⚠️ This page may combine multiple inventors who share the name “SHEA KEVIN R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHEA KEVIN R

MICRON TECHNOLOGY INC

Reduced cell-to-cell shorting for memory arrays

Methods of forming a plurality of capacitors

Methods of forming a plurality of capacitors

Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive material

Method for obtaining extreme selectivity of metal nitrides and metal oxides

Semiconductor processing methods

Double-sided container capacitors using a sacrificial layer

Double-sided container capacitors using a sacrificial layer

Reduced cell-to-cell shorting for memory arrays

Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor

Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor

Reduced cell-to-cell shorting for memory arrays

Method to address carbon incorporation in an interpoly oxide

Methods of removing metal-containing materials

Methods of removing metal-containing materials

Methods of forming a pattern on a substrate

Integrated circuit, construction of integrated circuitry, and method of forming an array

Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive material

Methods of forming capacitors

Methods of forming capacitors

Method to address carbon incorporation in an interpoly oxide

Methods of removing metal-containing materials

Substrate mask patterns, methods of forming a structure on a substrate, methods of forming a square lattice pattern from an oblique lattice pattern, and methods of forming a pattern on a substrate

Method for obtaining extreme selectivity of metal nitrides and metal oxides

Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive material

Methods of etching oxide, reducing roughness, and forming capacitor constructions

Methods of forming capacitors

Methods of removing metal-containing materials

Semiconductor fabrication processes

Methods of removing metal-containing materials

Substrate mask patterns, methods of forming a structure on a substrate, methods of forming a square lattice pattern from an oblique lattice pattern, and methods of forming a pattern on a substrate

Integrated circuit, construction of integrated circuitry, and method of forming an array

KIEHLBAUCH MARK

Methods of making capacitors

Methods of forming capacitors

Methods of forming capacitors

Methods of forming capacitors

SHEA KEVIN R

Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive material

Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive material

Method for obtaining extreme selectivity of metal nitrides and metal oxides

Selective etching of oxides to metal nitrides and metal oxides

BHAT VISHWANATH

Methods of forming a plurality of capacitors

Methods of forming a plurality of capacitors

Methods of forming a plurality of capacitors

BUSCH BRETT

Semiconductor devices and structures including at least partially formed container capacitors and methods of forming the same

Semiconductor devices and structures including at least partially formed container capacitors

BUSCH BRETT W

Integrated circuitry, methods of forming capacitors, and methods of forming integrated circuitry comprising an array of capacitors and circuitry peripheral to the array

RANA NIRAJ B

Methods of etching oxide, reducing roughness, and forming capacitor constructions