Inventor
KALENIAN WILLIAM J
US8 patents
⚠️ This page may combine multiple inventors who share the name “KALENIAN WILLIAM J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
STRASBAUGH
6 patentsUS7249992B2Jul 31, 2007
Method, apparatus and system for use in processing wafers
STRASBAUGH77 citations94
US8052504B2Nov 8, 2011
Method, apparatus and system for use in processing wafers
STRASBAUGH12 citations79
US9393669B2Jul 19, 2016
Systems and methods of processing substrates
STRASBAUGH5 citations68
US7156946B2Jan 2, 2007
Wafer carrier pivot mechanism
STRASBAUGH2 citations61
US9457446B2Oct 4, 2016
Methods and systems for use in grind shape control adaptation
STRASBAUGH2 citations58
US9193030B2Nov 24, 2015
CMP retaining ring with soft retaining ring insert
STRASBAUGH0 citations49