Inventor
SPIEGEL LARRY
US5 patents
⚠️ This page may combine multiple inventors who share the name “SPIEGEL LARRY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
STRASBAUGH
4 patentsUS7033252B2Apr 25, 2006
Wafer carrier with pressurized membrane and retaining ring actuator
STRASBAUGH23 citations87
US7238083B2Jul 3, 2007
Wafer carrier with pressurized membrane and retaining ring actuator
STRASBAUGH3 citations57
US7131892B2Nov 7, 2006
Wafer carrier with pressurized membrane and retaining ring actuator
STRASBAUGH3 citations57
US9193030B2Nov 24, 2015
CMP retaining ring with soft retaining ring insert
STRASBAUGH0 citations49