Inventor
OKABE AKIRA
JP23 patents
⚠️ This page may combine multiple inventors who share the name “OKABE AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS8888087B2Nov 18, 2014
Susceptor support portion and epitaxial growth apparatus including susceptor support portion
APPLIED MATERIALS INC150 citations98
US10443129B2Oct 15, 2019
Epitaxial growth device
APPLIED MATERIALS INC4 citations72
US10072354B2Sep 11, 2018
Lower side wall for epitaxial growth apparatus
APPLIED MATERIALS INC3 citations72
US9096949B2Aug 4, 2015
Susceptor support portion and epitaxial growth apparatus including susceptor support portion
APPLIED MATERIALS INC4 citations72
US11427928B2Aug 30, 2022
Lower side wall for epitaxtail growth apparatus
APPLIED MATERIALS INC0 citations62
US9663873B2May 30, 2017
Ceiling portion for epitaxial growth apparatus
APPLIED MATERIALS INC1 citations62
EPICREW CORP
5 patentsUSD693782SNov 19, 2013
Lid for epitaxial growing device
EPICREW CORP289 citations98
USD926715SAug 3, 2021
Support for a wafer for fabricating a semiconductor
EPICREW CORP6 citations75
US12327724B2Jun 10, 2025
Vapor deposition device and method of producing epitaxial wafer
EPICREW CORP0 citations51
US9250196B2Feb 2, 2016
Imaging device, semiconductor manufacturing apparatus, and semiconductor manufacturing method
EPICREW CORP2 citations51
US10222779B2Mar 5, 2019
Semiconductor wafer position display system, semiconductor wafer position display method, and semiconductor wafer position display program
EPICREW CORP0 citations33
HITACHI LTD
4 patentsUS4519207AMay 28, 1985
Combined plant having steam turbine and gas turbine connected by single shaft
HITACHI LTD92 citations95
US6853959B2Feb 8, 2005
Remote monitoring diagnostic system and method thereof
HITACHI LTD95 citations94
US4793132ADec 27, 1988
Apparatus for cooling steam turbine for use in single-shaft combined plant
HITACHI LTD39 citations92
US7386534B2Jun 10, 2008
Answer system for technical support, and technical support method
HITACHI LTD2 citations55