P

Inventor

YAMAZOE KENJI

US49 patents
⚠️ This page may combine multiple inventors who share the name “YAMAZOE KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

24 patents
US7009686B2Mar 7, 2006

Exposure method

CANON KK60 citations96
US7217503B2May 15, 2007

Exposure method and apparatus

CANON KK41 citations93
US7107573B2Sep 12, 2006

Method for setting mask pattern and illumination condition

CANON KK48 citations93
US7508493B2Mar 24, 2009

Exposure apparatus and device manufacturing method

CANON KK30 citations92
US7675629B2Mar 9, 2010

Exposure apparatus and device manufacturing method using a common path interferometer to form an interference pattern and a processor to calculate optical characteristics of projection optics using the interference pattern

CANON KK14 citations84
US7657865B2Feb 2, 2010

Computer-readable recording medium recording a mask data generation program, mask data generation method, mask fabrication method, exposure method, and device manufacturing method

CANON KK9 citations84
US7359033B2Apr 15, 2008

Exposure method and apparatus

CANON KK10 citations84
US7214453B2May 8, 2007

Mask and its manufacturing method, exposure, and device fabrication method

CANON KK16 citations84
US7573563B2Aug 11, 2009

Exposure apparatus and device manufacturing method

CANON KK7 citations74
US6839890B2Jan 4, 2005

Mask manufacturing method

CANON KK9 citations74
US9507253B2Nov 29, 2016

Mask pattern generating method, recording medium, and information processing apparatus

CANON KK4 citations73
US9228921B2Jan 5, 2016

Aberration estimating method, program, and image-pickup apparatus

CANON KK3 citations73
US10073936B2Sep 11, 2018

Calculation method, generation method, program, exposure method, and mask fabrication method

CANON KK1 citations63
US8635563B2Jan 21, 2014

Mask data producing method and mask data producing program

CANON KK2 citations63
US8365104B2Jan 29, 2013

Original data producing method and original data producing program

CANON KK2 citations63
US7761840B2Jul 20, 2010

Mask data generation including a main pattern and an auxiliary pattern

CANON KK4 citations63
US7586626B2Sep 8, 2009

Measurement method, exposure method, exposure apparatus, and device fabrication method

CANON KK2 citations63
US7399558B2Jul 15, 2008

Mask and manufacturing method thereof and exposure method

CANON KK3 citations63
US7317511B2Jan 8, 2008

Light modulator, and optical apparatus using the same

CANON KK2 citations63
US7379151B2May 27, 2008

Exposure apparatus comprising cleaning apparatus for cleaning mask with laser beam

CANON KK3 citations62
US7821648B2Oct 26, 2010

Measurement method, a measurement apparatus, and a computer-readable recording medium

CANON KK3 citations61
US7414240B2Aug 19, 2008

Particle remover, exposure apparatus having the same, and device manufacturing method

CANON KK0 citations52
US6968529B2Nov 22, 2005

Phase shift mask, and exposure method and device manufacturing method using the same

CANON KK0 citations52
US9678441B2Jun 13, 2017

Mask pattern generation method and optical image calculation method

CANON KK0 citations41

TAIWAN SEMICONDUCTOR MFG CO LTD

10 patents

CANON USA INC

6 patents

YAMAZOE KENJI

5 patents

KAWASHIMA MIYOKO

1 patent

HAKKO MANABU

1 patent

SEKINE YOSHIYUKI

1 patent

OSHIMA YUKI

1 patent