Inventor

TIERSCH MATTHEW T

US13 patents

⚠️ This page may combine multiple inventors who share the name “TIERSCH MATTHEW T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

5 patents

US6294105B1Sep 25, 2001

Chemical mechanical polishing slurry and method for polishing metal/oxide layers

IBM22 citations92

US5885135AMar 23, 1999

CMP wafer carrier for preferential polishing of a wafer

IBM32 citations87

US6355565B2Mar 12, 2002

Chemical-mechanical-polishing slurry and method for polishing metal/oxide layers

IBM5 citations73

US7987591B2Aug 2, 2011

Method of forming silicon chicklet pedestal

IBM1 citations62

US7824568B2Nov 2, 2010

Solution for forming polishing slurry, polishing slurry and related methods

IBM2 citations59

CHEY S JAY

2 patents

US8806740B2Aug 19, 2014

Silicon chicklet pedestal

CHEY S JAY0 citations51

US8595919B2Dec 3, 2013

Silicon chicklet pedestal

CHEY S JAY0 citations51

BATES GRAHAM M

2 patents

US9057004B2Jun 16, 2015

Slurry for chemical-mechanical polishing of metals and use thereof

BATES GRAHAM M0 citations46

US8734665B2May 27, 2014

Slurry for chemical-mechanical polishing of copper and use thereof

BATES GRAHAM M1 citations46

COMEAU JOSEPH K V

2 patents

US8636917B2Jan 28, 2014

Solution for forming polishing slurry, polishing slurry and related methods

COMEAU JOSEPH K V0 citations44

US8328892B2Dec 11, 2012

Solution for forming polishing slurry, polishing slurry and related methods

COMEAU JOSEPH K V0 citations44

MCDEVITT THOMAS L

1 patent

US8088690B2Jan 3, 2012

CMP method

MCDEVITT THOMAS L3 citations55

GLOBALFOUNDRIES INC

1 patent

US9708508B2Jul 18, 2017

Slurry for chemical-mechanical polishing of metals and use thereof

GLOBALFOUNDRIES INC0 citations49