Inventor

SHAH EVA A

US7 patents

⚠️ This page may combine multiple inventors who share the name “SHAH EVA A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BATES GRAHAM M

2 patents

US9057004B2Jun 16, 2015

Slurry for chemical-mechanical polishing of metals and use thereof

BATES GRAHAM M0 citations46

US8734665B2May 27, 2014

Slurry for chemical-mechanical polishing of copper and use thereof

BATES GRAHAM M1 citations46

CHRISMAN GREGORY S

1 patent

US8575022B2Nov 5, 2013

Top corner rounding of damascene wire for insulator crack suppression

CHRISMAN GREGORY S9 citations76

MCDEVITT THOMAS L

1 patent

US8088690B2Jan 3, 2012

CMP method

MCDEVITT THOMAS L3 citations55

GLOBALFOUNDRIES INC

1 patent

US9708508B2Jul 18, 2017

Slurry for chemical-mechanical polishing of metals and use thereof

GLOBALFOUNDRIES INC0 citations49

AMOAH YOBA

1 patent

US8637403B2Jan 28, 2014

Locally tailoring chemical mechanical polishing (CMP) polish rate for dielectrics

AMOAH YOBA1 citations47

BHAGAT DARSHANA N

1 patent

US8877596B2Nov 4, 2014

Semiconductor devices with asymmetric halo implantation and method of manufacture

BHAGAT DARSHANA N0 citations39