Inventor
YI CHANG BOK
US4 patents
⚠️ This page may combine multiple inventors who share the name “YI CHANG BOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
YI CHANG BOK
3 patentsUS8701753B2Apr 22, 2014
Method and apparatus for cooling a planar workpiece in an evacuated environment with dynamically moveable heat sinks
YI CHANG BOK6 citations62
US9228254B2Jan 5, 2016
Cathode sputtering gas distribution apparatus
YI CHANG BOK1 citations45
US8573579B2Nov 5, 2013
Biasing a pre-metalized non-conductive substrate
YI CHANG BOK0 citations33