Inventor

TANAKA TATSURU

US8 patents

⚠️ This page may combine multiple inventors who share the name “TANAKA TATSURU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YI CHANG BOK

3 patents

US8701753B2Apr 22, 2014

Method and apparatus for cooling a planar workpiece in an evacuated environment with dynamically moveable heat sinks

YI CHANG BOK6 citations62

US9228254B2Jan 5, 2016

Cathode sputtering gas distribution apparatus

YI CHANG BOK1 citations45

US8573579B2Nov 5, 2013

Biasing a pre-metalized non-conductive substrate

YI CHANG BOK0 citations33

DENSO CORP

2 patents

US10744842B2Aug 18, 2020

Vehicular air conditioning device

DENSO CORP2 citations71

US10744852B2Aug 18, 2020

Vehicular air-conditioning device

DENSO CORP0 citations37

POON CHIN YIM

1 patent

US8674327B1Mar 18, 2014

Systems and methods for uniformly implanting materials on substrates using directed magnetic fields

POON CHIN YIM70 citations91

INTEVAC INC

1 patent

US6517691B1Feb 11, 2003

Substrate processing system

INTEVAC INC46 citations88

WD MEDIA LLC

1 patent

US10054363B2Aug 21, 2018

Method and apparatus for cryogenic dynamic cooling

WD MEDIA LLC0 citations43