Inventor

DOYTCHEVA MAYA ANGELOVA

NL6 patents

⚠️ This page may combine multiple inventors who share the name “DOYTCHEVA MAYA ANGELOVA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SEWELL HARRY

2 patents

US8625096B2Jan 7, 2014

Method and system for increasing alignment target contrast

SEWELL HARRY3 citations60

US8709908B2Apr 29, 2014

Improving alignment target contrast in a lithographic double patterning process

SEWELL HARRY1 citations50

KONINKL PHILIPS ELECTRONICS NV

1 patent

US6600260B2Jul 29, 2003

Gas discharge lamp with down conversion luminophore

KONINKL PHILIPS ELECTRONICS NV11 citations72

ASML HOLDING NV

1 patent

US8980724B2Mar 17, 2015

Alignment target contrast in a lithographic double patterning process

ASML HOLDING NV0 citations50

VAN HAREN RICHARD JOHANNES FRANCISCUS

1 patent

US8319967B2Nov 27, 2012

Marker structure and method of forming the same

VAN HAREN RICHARD JOHANNES FRANCISCUS0 citations49

DOYTCHEVA MAYA ANGELOVA

1 patent

US8329366B2Dec 11, 2012

Apparatus and method for providing resist alignment marks in a double patterning lithographic process

DOYTCHEVA MAYA ANGELOVA0 citations42