Inventor

VAN HAREN RICHARD JOHANNES FRANCISCUS

NL83 patents

⚠️ This page may combine multiple inventors who share the name “VAN HAREN RICHARD JOHANNES FRANCISCUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VAN HAREN RICHARD JOHANNES FRANCISCUS

ASML NETHERLANDS BV

Lithographic apparatus and device manufacturing method with reduced scribe lane usage for substrate measurement

Alignment systems and methods for lithographic systems

Methods and apparatus for obtaining diagnostic information relating to an industrial process

Methods and apparatus for obtaining diagnostic information relating to an industrial process

Alignment tool for a lithographic apparatus

Metrology method, target and substrate

Metrology method, target and substrate

Methods and apparatus for obtaining diagnostic information relating to an industrial process

Metrology method, target and substrate

Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods

Device manufacturing method and computer program product

Binary sinusoidal sub-wavelength gratings as alignment marks

Marker structure and method for controlling alignment of layers of a multi-layered substrate

Marker structure, mask pattern, alignment method and lithographic method and apparatus

Metrology target, method and apparatus, target design method, computer program and lithographic system

Methods and apparatus for obtaining diagnostic information relating to an industrial process

Metrology method, target and substrate

Metrology using a plurality of metrology target measurement recipes

Method and apparatus for controlling an industrial process using product grouping

Optimization of target arrangement and associated target

Metrology method and apparatus, substrates for use in such methods, lithographic system and device manufacturing method

Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product

Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus

Lithographic apparatus and device manufacturing method

Alignment systems and methods for lithographic systems

Generating predicted data for control or monitoring of a production process

Metrology method and apparatus, computer program and lithographic system

Metrology apparatus

Deformation pattern recognition method, pattern transferring method, processing device monitoring method, and lithographic apparatus

Lithographic apparatus and method

Alignment mark positioning in a lithographic process

Methods and apparatus for use in a device manufacturing method

Method of creating an alignment mark on a substrate and substrate

Lithographic apparatus and device manufacturing method with double exposure overlay control

Lithographic apparatus and device manufacturing method with reduced scribe lane usage for substrate measurement

Lithographic apparatus and device manufacturing method with double exposure overlay control

Lithographic apparatus and device manufacturing method

Alignment mark, use of a hard mask material, and method

Metrology method, target and substrate

Methods and apparatus for obtaining diagnostic information relating to an industrial process

Lithographic method and lithographic apparatus

Methods and apparatus for obtaining diagnostic information relating to an industrial process

Lithographic method and lithographic apparatus

Focus and overlay improvement by modifying a patterning device

Method and apparatus to reduce effects of nonlinear behavior

VAN DER SANDEN STEFAN CORNELIS THEODORUS

Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods

VAN BILSEN FRANCISCUS BERNARDUS MARIA

Alignment systems and methods for lithographic systems

VAN HAREN RICHARD JOHANNES FRANCISCUS

Method of providing alignment marks, device manufacturing method and lithographic apparatus

MUSA SAMI

Alignment method, alignment system, and product with alignment mark

ASML NETHERLANDS N V

Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus